北京粉体技术协会标准   T/BSPT 002-2018   19.120. A28 2018-07-01 实施 2018-06-20 发布 北京粉体技术协会 发布 微纳加工离子束辐照应变诱导 三维纳米结构与器件的加工方法 Micro/nano fabrication The fabrication of 3D nanostructures formed by strain via ion beam irradiation T/BSPT 002-2018 II 目 次 封面 .............................................................................................................................. ......................................... I 目次 .............................................................................................................................. ....................................... Ⅱ 前言 .............................................................................................................................. ....................................... Ⅲ 引言 .............................................................................................................................. ....................................... IV 1 范围 .............................................................................................................................. ..................................... 1 2 规范性引用文件 .............................................................................................................................. ................. 1 3定义和缩略语 .............................................................................................................................. ...................... 1 3.1定义 .............................................................................................................................. ................................... 1 3.2 缩略语 .............................................................................................................................. .............................. 1 4 原理与方法概要 .............................................................................................................................. ................. 2 5 材料与设备 ... ........................................................................................................................... ......................... 2 6 环境条件 .............................................................................................................................. ............................. 3 7加工程序 .............................................................................................................................. .............................. 3 7.1 衬底的清洗 .............................................................................................................................. .................... 3 7.2 利用自支撑准直纳米线构建三维纳米结构 .............................................................................................. 3 7.3 利用自支撑薄膜构建三维纳米结构 .......................................................................................................... 4 7.4保存 .............................................................................................................................. ................................... 5 8检测及评价指标 .............................................................................................................................. .................. 5 8.1 检测 .............................................................................................................................. .................................. 5 8.2 评价指标 .............................................................................................................................. .......................... 5 附录 A（资料性附录）样品的检测实例 ........................................................................................................... 6 A.1 扫描电子显微镜 .............................................................................................................................. ............. 6 A.2环境要求 .............................................................................................................................. ............